JPH0395634U - - Google Patents
Info
- Publication number
- JPH0395634U JPH0395634U JP93990U JP93990U JPH0395634U JP H0395634 U JPH0395634 U JP H0395634U JP 93990 U JP93990 U JP 93990U JP 93990 U JP93990 U JP 93990U JP H0395634 U JPH0395634 U JP H0395634U
- Authority
- JP
- Japan
- Prior art keywords
- splash guard
- semiconductor wafer
- wafer processing
- processing apparatus
- rinsing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims 8
- 239000007788 liquid Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 1
- 239000012487 rinsing solution Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
- 238000001039 wet etching Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP93990U JPH0395634U (en]) | 1990-01-11 | 1990-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP93990U JPH0395634U (en]) | 1990-01-11 | 1990-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395634U true JPH0395634U (en]) | 1991-09-30 |
Family
ID=31504873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP93990U Pending JPH0395634U (en]) | 1990-01-11 | 1990-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395634U (en]) |
-
1990
- 1990-01-11 JP JP93990U patent/JPH0395634U/ja active Pending
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